VDI/VDE 2655 Blatt 1.3:2018-03 - Draft

Optical measurement of microtopography - Calibration of interference microscopes for form measurement

German title: Optische Messtechnik an Mikrotopographien - Kalibrieren von flächenhaft messenden Interferometern und Interferenzmikroskopen für die Formmessung
Publication date: 2018-03
Original language: German
Pages: 31

Publication date: 2018-03
Original language: German
Pages: 31

Product information on this site:

Quick delivery via download or delivery service

Buy securely with a credit card or pay upon receipt of invoice

All transactions are encrypted

Short description

This standard characterises interference microscopes with their measuring technology properties for measuring the surfaces of form elements. This includes the feedback and the calculation of the measurement uncertainty when measuring shape parameters. In addition to the interference microscopes described in VDI 2655 Part 1.1, the methods described here can also be applied to interferometers whose measuring fields can have dimensions of up to approx. Ø 20 mm.

Content

ICS

17.180.01

Replacement amendments

This document has been replaced by: VDI/VDE 2655 Blatt 1.3:2020-02 .

Also available in

Loading recommended items...