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Standard [CURRENT]

ASTM E 1162:2011

Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)

German title
Sekundärionenmassenspektrometer; Angaben für den Prüfbericht
Publication date
2011 reapproved: 2019
Original language
English
Pages
3

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Publication date
2011 reapproved: 2019
Original language
English
Pages
3
DOI
https://dx.doi.org/10.1520/E1162-11R19

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ICS
71.040.50
DOI
https://dx.doi.org/10.1520/E1162-11R19
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