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Standard [CURRENT]

BS EN 62047-10:2011-09-30

Semiconductor devices. Micro-electromechanical devices. Micro-pillar compression test for MEMS materials

German title
Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Druckprüfverfahren an zylinderförmigen Mikroproben für Werkstoffe der Mikrosystemtechnik
Publication date
2011-09-30
Original language
English
Pages
18

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Publication date
2011-09-30
Original language
English
Pages
18

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