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BS EN ISO 14644-9:2012-08-31

Cleanrooms and associated controlled environments. Classification of surface cleanliness by particle concentration

German title
Reinräume und zugehörige Reinraumbereiche. Klassifzierung der partikulären Oberflächenreinheit
Publication date
2012-08-31
Original language
English
Pages
36
Publication date
2012-08-31
Original language
English
Pages
36

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Replacement amendments

This document has been replaced by: BS EN ISO 14644-9:2022-07-08 .

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