Dear Customer,

This year, on the occasion of our 100th anniversary, we will be positioning ourselves for the future as part of the DIN Group with a new name. 

And so as of April 22, 2024

Beuth Verlag will become DIN Media. 

You can find out more about our new name and the reasons behind it here.

Yours sincerely,
Beuth Verlag

Standards Worldwide
Standards Worldwide
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Standard [CURRENT]

DIN 32566:2007-12

Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring

German title
Fertigungsmittel für Mikrosysteme - Spezifikation eines Maskentragrings für die Röntgentiefenlithographie
Publication date
2007-12
Original language
German
Pages
9

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Publication date
2007-12
Original language
German
Pages
9
DOI
https://dx.doi.org/10.31030/1383129

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Content
ICS
31.020, 37.020
DOI
https://dx.doi.org/10.31030/1383129

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