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Standard [CURRENT]

DIN 50989-1:2018-03

Ellipsometry - Part 1: Principles; Text in German and English

German title
Ellipsometrie - Teil 1: Grundlagen; Text Deutsch und Englisch
Publication date
2018-03
Original language
German, English
Note
The publisher recommends this document in lieu of the withdrawn document PAS 1022:2004-02 , for which no replacement is available.

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Publication date
2018-03
Original language
German, English
Note
The publisher recommends this document in lieu of the withdrawn document PAS 1022:2004-02 , for which no replacement is available.
DOI
https://dx.doi.org/10.31030/2799141

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DOI
https://dx.doi.org/10.31030/2799141

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