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Standard [CURRENT]

NF C96-050-17:2015-11-14

NF EN 62047-17:2015-11-14

Semiconductor devices - Micro-electromechanical devices - Part 17: bulge test method for measuring mechanical properties of thin films

German title
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 17: Wölbungs-Prüfverfahren zur Bestimmung mechanischer Eigenschaften dünner Schichten
Publication date
2015-11-14
Original language
French
Pages
32

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Publication date
2015-11-14
Original language
French
Pages
32

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