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Standard 2017-01-01

OVE EN 62047-1:2017-01-01

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1:2016) (german version)

German title
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 1: Begriffe (IEC 62047-1:2016) (deutsche Fassung)
Publication date
2017-01-01
Original language
German

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Publication date
2017-01-01
Original language
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