VDI 2083 Blatt 3:2022-08

Cleanroom technology - Metrology

German title: Reinraumtechnik - Messtechnik
Publication date: 2022-08
Original language: German, English
Pages: 71

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Publication date: 2022-08
Original language: German, English
Pages: 71

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Short description

This standard describes measurement methods for clean rooms and associated clean room areas, which are used during handover, in the qualification of new plants, routine monitoring and ongoing monitoring. The methods described in this standard are specially designed to meet the requirements of clean rooms. The standard applies to initial and one-off measurements as well as consecutive or periodic monitoring. (Continuous measurements for monitoring purposes are described in VDI 2083 Part 3.1.) The specified methods are intended for the handover of cleanroom installations as well as for the execution of routine and monitoring measurements in accordance with DIN EN 12599, VDI 2083 Part 2 and DIN EN ISO 14644-4 and are intended to replace user-specific procedures as far as possible.

Content

ICS

13.040.35

Replacement amendments

This document replaces VDI 2083 Blatt 3:2005-07 .

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