Cleanrooms and associated controlled environments - Part 12: Classification of air cleanliness by nanoscale particle concentration (ISO/DIS 14644-12:2013); German version prEN ISO 14644-12:2013
German title
Reinräume und zugehörige Reinraumbereiche - Teil 12: Klassifizierung der Luftreinheit anhand der Nanopartikelkonzentration (ISO/DIS 14644-12:2013); Deutsche Fassung prEN ISO 14644-12:2013
Date of issue
2013-04-15
Publication date
2013-04
Original language
German
Pages
26
Date of issue
2013-04-15
Publication date
2013-04
Original language
German
Pages
26
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Content
ICS
13.040.35
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