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Draft standard [WITHDRAWN]

DIN ISO 18516:2020-01 - Draft

Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English

German title
Chemische Oberflächenanalyse - Augerelektronen-Spektroskopie und Röntgenphotoelektronen-Spektroskopie - Bestimmung der lateralen Auflösung (ISO 18516:2019); Text Englisch
Date of issue
2019-11-29
Publication date
2020-01
Original language
English
Pages
63

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Date of issue
2019-11-29
Publication date
2020-01
Original language
English
Pages
63
DOI
https://dx.doi.org/10.31030/3107564

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Content
ICS
71.040.40
DOI
https://dx.doi.org/10.31030/3107564
Replacement amendments

This document has been replaced by: DIN ISO 18516:2020-11 .

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