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Draft technical rule [WITHDRAWN]

VDI 2083 Blatt 1.1:2020-06 - Draft

Cleanroom technology - Particulate air cleanliness classes for nano-scaled particles (ACnP)

German title
Reinraumtechnik - Partikelreinheitsklassen der Luft anhand nanopartikulärer Konzentration (ACnP)
Publication date
2020-06
Original language
German
Pages
7

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Publication date
2020-06
Original language
German
Pages
7

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Short description
This standard describes the measurement and classification of air cleanliness in regard to nanoparticles with dimensions from 5 nm up to < 100 nm regardless of their origin. According to this standard, primarily not a complete clean room is classified with regard to the airborne concentration of nanoscale particles, but local concentration ratios at specifically defined points.
Content
ICS
13.040.35
Replacement amendments

This document has been replaced by: VDI 2083 Blatt 1.1:2021-01 .

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