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Pre-standard

IEC/TS 62622:2012-10

Nanotechnologies - Description, and measurement of dimensional quality parameters of artificial gratings

German title
In der Nanotechnologie verwendetet künstliche Gitter - Beschreibung und Messung dimensionaler Qualitätsparameter
Publication date
2012-10
Original language
English
Pages
40

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Publication date
2012-10
Original language
English
Pages
40

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Content
ICS
07.120

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