Testing of semiconductor materials; measurement of the resistivity of silicon or germanium single crystals by means of the four probe/direct current method with collinear array
German title
Prüfung von Materialien für die Halbleitertechnologie; Messung des spezifischen elektrischen Widerstandes von Einkristallen aus Silicium oder Germanium mit dem Vier-Sonden-Gleichstrom-Verfahren bei linearer Anordnung der Sonden
Publication date
1988-05
Original language
German
Pages
5
Publication date
1988-05
Original language
German
Pages
5
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