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Standard [WITHDRAWN]

DIN 50451-2:1990-10

Determination of cobalt, chromium, copper, iron and nickel as impurities in hydrofluoric acid for use in semiconductor technology by plasma-induced emission spectrometry

German title
Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Metallspuren in Flüssigkeiten; Kobalt (Co), Chrom (Cr), Kupfer (Cu), Eisen (Fe) und Nickel (Ni) in Flußsäure mittels Plasma-angeregter Emissionsspektrometrie
Publication date
1990-10
Original language
German
Pages
2

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Publication date
1990-10
Original language
German
Pages
2

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Replacement amendments

This document has been replaced by: DIN 50451-2:2003-04 .

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