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Standard [CURRENT]

DIN EN 62047-26:2016-12

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (IEC 62047-26:2016); German version EN 62047-26:2016

German title
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 26: Beschreibung und Messverfahren für Mikro-Rillen und Nadelstrukturen (IEC 62047-26:2016); Deutsche Fassung EN 62047-26:2016
Publication date
2016-12
Original language
German
Pages
29

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Publication date
2016-12
Original language
German
Pages
29
DOI
https://dx.doi.org/10.31030/2555908

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ICS
31.080.01, 31.220.01
DOI
https://dx.doi.org/10.31030/2555908

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