We use cookies to make our websites more user-friendly and to continuously improve them. If you continue to use the website, you consent to the use of cookies. You can find more information in our privacy statement and our cookie guidelines.

To our valued customers,

At last: 

Beuth Verlag is now DIN Media. 

You can find out more about our new name and the reasons behind it here.

To use our new website without any hiccups, please clear your browser cache. 

Yours sincerely,

DIN Media

Standards Worldwide
Standards Worldwide
Phone +49 30 58885700-07

Standard [CURRENT]

OEVE/OENORM EN 62047-2:2007-03-01

Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials (IEC 62047-2:2006)

German title
Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 2: Prüfverfahren zur Zugbeanspruchung bei Dünnschicht-Werkstoffen (IEC 62047-2:2006)
Publication date
2007-03-01
Original language
German
Pages
14

Please select

from 86.54 EUR VAT included

from 80.88 EUR VAT excluded

Purchasing options

PDF download

  • 86.54 EUR

Shipment (3-5 working days)

  • 97.26 EUR

Standards Ticker 1
1

Learn more about the standards ticker

Publication date
2007-03-01
Original language
German
Pages
14

Product information on this site:

Quick delivery via download or delivery service

Buy securely with a credit card or pay upon receipt of invoice

All transactions are encrypted

Loading recommended items...
Loading recommended items...
Loading recommended items...
Loading recommended items...