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Standard 2015-08-01

UNE-EN 62047-16:2015-08-01

Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods (Endorsed by AENOR in August of 2015.)

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2015-08-01
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