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Technical rule [CURRENT]

IEC/TR 63258:2021-03

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

German title
Nanotechnoogien - Ein Leitfaden zur Bestimmung der Dicke nanoskaliger Filme mit Hilfe von Ellipsometrie
Publication date
2021-03
Original language
English
Pages
21

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Publication date
2021-03
Original language
English
Pages
21

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Content
ICS
07.120

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