We use cookies to make our websites more user-friendly and to continuously improve them. If you continue to use the website, you consent to the use of cookies. You can find more information in our privacy statement and our cookie guidelines.

To our valued customers,

At last: 

Beuth Verlag is now DIN Media. 

You can find out more about our new name and the reasons behind it here.

To use our new website without any hiccups, please clear your browser cache. 

Yours sincerely,

DIN Media

Standards Worldwide
Standards Worldwide
Phone +49 30 58885700-07

Technical rule [CURRENT]

VDI/VDE 2655 Blatt 1.3:2020-02

Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement

German title
Optische Messtechnik an Mikrotopografien - Kalibrieren von flächenhaft messenden Interferometern und Interferenzmikroskopen für die Formmessung
Publication date
2020-02
Original language
German, English
Pages
50

Please select

from 123.60 EUR VAT included

from 115.51 EUR VAT excluded

Purchasing options

PDF download

  • 123.60 EUR

Shipment (3-5 working days)

  • 137.50 EUR

Standards Ticker 1
1

Learn more about the standards ticker

Online service subscriptions

This document also features in an online service. Online services not only give you electronic access to collections of standards, they contain lots of extra information too (such as directives, legal texts, commentaries, etc.). There are automatic updates on a regular basis – and online services also give you large savings compared with the cost of purchasing standards individually.

Suitable online services
Publication date
2020-02
Original language
German, English
Pages
50

Product information on this site:

Quick delivery via download or delivery service

Buy securely with a credit card or pay upon receipt of invoice

All transactions are encrypted

Short description
This standard characterises interference microscopes with their measuring technology properties for measuring the surfaces of form elements. This includes the feedback and the calculation of the measurement uncertainty when measuring shape parameters. In addition to the interference microscopes described in VDI 2655 Part 1.1, the methods described here can also be applied to interferometers whose measuring fields can have dimensions of up to approx. Ø 20 mm.
Content
ICS
17.180.01
Also available in
Loading recommended items...
Loading recommended items...
Loading recommended items...