Mask engineering; introduction, terms and definitions
German title
Maskentechnik; Einführung, Begriffe und Definitionen
Publication date
1985-12
Original language
German,
English
Pages
7
Publication date
1985-12
Original language
German,
English
Pages
7
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Short description
This guideline is intended to provide both the manufacturer and the user of masks with a concise survey of current mask engineering. In addition, it contains basic information concerning the terms, definitions, specifications and working methods used.