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Draft standard [WITHDRAWN]

DIN 50453-2:2023-02 - Draft

Testing of materials for semiconductor technology - Determination of etch rates of etching mixtures - Part 2: Silicium-dioxid coating, optical method

German title
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung der Ätzrate von Ätzmischungen - Teil 2: Siliciumdioxid-Schichten, Optisches Verfahren
Date of issue
2023-01-06
Publication date
2023-02
Original language
German
Pages
8

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Date of issue
2023-01-06
Publication date
2023-02
Original language
German
Pages
8
DOI
https://dx.doi.org/10.31030/3400900

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Content
ICS
29.045
DOI
https://dx.doi.org/10.31030/3400900
Replacement amendments

This document has been replaced by: DIN 50453-2:2023-08 .

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